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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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0 systems
Canon BG3-3521
Ready to Ship
Serviced by GCE

Canon BG3-3521

FZANA 2 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3526
Ready to Ship
Serviced by GCE

Canon BG3-3526

Stage DSP PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG3-3607
Ready to Ship
Serviced by GCE

Canon BG3-3607

HL(M) IF PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3608
Ready to Ship
Serviced by GCE

Canon BG3-3608

HL(S) IF PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3822
Ready to Ship
Serviced by GCE

Canon BG3-3822

DMP-PRE PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3823
Ready to Ship
Serviced by GCE

Canon BG3-3823

DMP-DSP PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3824
Ready to Ship
Serviced by GCE

Canon BG3-3824

AIN-IF PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3825
Ready to Ship
Serviced by GCE

Canon BG3-3825

MLE-IF PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3826
Ready to Ship
Serviced by GCE

Canon BG3-3826

Laser-IF PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3827
Ready to Ship
Serviced by GCE

Canon BG3-3827

Measurement PCB XY (ZMI 2004)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3828
Ready to Ship
Serviced by GCE

Canon BG3-3828

Laser-IF PCB Assembly (R)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3829
Ready to Ship
Serviced by GCE

Canon BG3-3829

Laser-IF PCB Assembly (Z)

Compatibility
Canon FPA-3000
Condition
Removed from working system
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