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Serviced by GCE
KLA 0133889-000
Stage Controller, Equipe
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
KLA-Tencor 8100XPR CD-SEM
KLA-Tencor 8100XPR CD-SEM measures 30 nm features at up to 50 wafers per hour, adding reticle handling and dual-station wafer loading to the 8100XP platform.
KLA-Tencor 8100XPR CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.
Chamber pump: Edwards or Varian dry scroll pump.
Load lock pump: Edwards or Varian dry scroll pump.
Dedicated UPS system for emergency power back up.
Power: 120V-220VAC, 1PH, 50/60HZ.
Guaranteed to be in full compliance with original new tool specifications. Full acceptance testing prior to shipment. Installation, start up, & training at customer's facility worldwide.
Specifications
Brand
KLA
Model
CD-SEM 8100XPR
Model Year
1999
Category
E-Beam Metrology
Serial Number
Several
Reticle size (inches)
5–6
Resolution
4
Throughput (WPH 8")
50
Wafer Sizes
3", 4", 6", 8"
Wafer types
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Wafer Loading Stations
1–2
Reticle Loading Stations
1–2
Feature Size (nm)
30
Resolution (nm)
4
Magnification (kX)
2.34–400
Stage Accuracy (um)
10
Accelerating Voltage (kV)
0.4–1.5
Operating System
Mac, Win NT/XP
Schottky Electron source
Yes
Size/Type Mix & Match on the Fly
Yes
Configuration / Reconfiguration
What GCE can adapt on this system.
This isn't a fixed listing. We reconfigure the tool for the process you're actually going to run — a different wafer size, a different application, a substrate the previous owner never used. Every system is refurbished to OEM spec first; the configuration work is where we match it to your line.
Wafer size
reconfigure across
3", 4", 6", 8"
Application
configured for
KLA-Tencor 8100XPR CD-SEM
Compound-semiconductor substrates
SiC, GaN, GaAs, InP, sapphire, quartz, where the platform supports it.
Spare Parts
Spare parts for this system
Serviced by GCE
KLA 0145906-001
Aperture Strip Assembly, 14 holes
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 0723-2024-001
IP Controller Interface Kit (with new controller)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 130-00679-000
Feedthrough
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA 371-07734-000
Scintillator
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 460-15018-000
Image / Frame Grabber PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA 471-12148-000
Zygo 7705, Laser Head
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 720-02841-500
Stage Motor, Brushed
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Request this system.
In stock, refurbished to OEM spec, and demo-ready on our own line. Ask for a quote, or schedule a demo and watch it run before you commit — no obligation.
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