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Serviced by GCE
Canon FPA-3000 EX3 Wafer Stepper
Light source
248
Wafer size
4", 6", 8"
Resolution (nm)
250
Throughput (WPH 8")
57
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Photolithography
Refurbished photolithography systems, restored, reconfigured, and supported
Wafer steppers for i-line and DUV lithography, refurbished to original performance and shipped with warranty.
About photolithography
What is photolithography?
Photolithography is the step in semiconductor manufacturing that transfers a circuit pattern onto a wafer. A wafer stepper projects the pattern from a photomask, through a lens, onto a photoresist-coated wafer one field at a time, "stepping" across the wafer until the whole surface is exposed. The resist is then developed and the pattern etched or doped into the wafer. Resolution is set by the exposure wavelength: i-line uses 365nm light, DUV uses 248nm. Shorter wavelengths print smaller features.
What is a wafer stepper?
A wafer stepper is the exposure tool that does this patterning. It holds the photomask (reticle), aligns it to the wafer, and exposes one field at a time at high throughput. Steppers are defined by their light source (i-line or DUV), the wafer sizes they handle, and the smallest feature they can resolve. The Canon FPA-3000 steppers GCE refurbishes cover i-line and DUV exposure on wafers from 100mm to 200mm.
i-line vs. DUV — what's the difference?
i-line steppers expose at 365nm and are the workhorse for mature-node and compound-semiconductor processes. DUV steppers expose at 248nm for finer geometries. Many fabs run both, and GCE supports both classes within the FPA-3000 line.
See the Canon FPA-3000 model line
Canon
9 models
+ More brands
Coming soon
Canon FPA-3000 series refurbished and reconfigured by GCE
The FPA-3000 is Canon's wafer-stepper platform for i-line and DUV lithography. GCE refurbishes the full line to original performance, reconfigures for wafer size and material, and ships every system with warranty. Each is tested on our own line before it leaves.
Serviced by GCE
Canon FPA-3000 EX4 Wafer Stepper
Light source
248
Wafer size
4", 6", 8"
Resolution (nm)
250
Throughput (WPH 8")
75
Serviced by GCE
Canon FPA-3000 EX5 Wafer Stepper
Light source
248
Wafer size
4", 6", 8"
Resolution (nm)
220
Throughput (WPH 8")
85
All FPA-3000 systems support wafer sizes of 4″, 6″, or 8″ (100mm, 150mm, 200mm). Reconfiguration available across wafer size and material.
Explore all equipments
Photolithography Services
What GCE actually does to a Canon FPA-3000
These are services on the equipment. We refurbish, reconfigure, install, service, and relocate the tool itself. We don't run your photolithography process.
Refurbishment, system by system
Every FPA-3000 that leaves GCE goes through full component-level rework, not a surface reconditioning:
Optics & illumination
Mercury lamp and Zygo laser replaced with new. Ellipsoidal mirror replaced with new. Full optical system inspection and refurbishment as required.
Wafer & reticle handling
Wafer robot, reticle robot, and reticle cassette robot each rebuilt and re-calibrated. Masking blade and exposure shutter assemblies rebuilt.
Stage systems
XY stage and tilt stage refurbished as required.
Controls & electronics
Workstation and CAM unit hard drives converted to SSD. All wiring, tubing, and mechanical assemblies inspected and repaired or replaced as required.
Final qualification
Full operational checks, calibration, and qualification to confirm performance equal to or better than original tool specification.
Reconfiguration, by wafer size and material
Every FPA-3000 is reconfigured to the customer's actual wafer, not shipped as a fixed configuration:
Wafer size
100mm, 150mm, 200mm
Pre-aligner, ceramic wafer-handling finger, and wafer chuck adjusted or replaced as needed for the target size.
Wafer material
Silicon, SiC, sapphire, GaN, GaAs, quartz
The same three components, pre-aligner, ceramic finger, chuck, adjusted for the wafer's optical and physical handling characteristics.
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On-site field service
GCE's field engineers work on FPA-3000 tools already running in the field, not just in our shop:
Scheduled preventive maintenance
Remote diagnostics first, calibration checks, error-log review, escalating to an on-site visit only when the issue can't be resolved remotely
Tool-down troubleshooting and recovery across stage, optics, and reticle-handling systems
Reticle stage troubleshooting and repair, on-site
Tilt stage troubleshooting and repair, on-site
XY stage magnet and air pad replacement, on-site
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Installation, turnkey delivery & relocation
GCE's own field engineers install and qualify every FPA-3000 on-site, validated against the same OEM specification used during in-house refurbishment. When a tool needs to move instead, GCE handles the full relocation: de-installation, export-ready lockdown hardware and crating, transport, and reinstallation and re-qualification to spec at the new facility, including customs and site-access coordination on international moves. GCE has delivered turnkey FPA-3000 systems and relocations across the world. See De-installation & Relocation for the full process.
Twenty-five years on this platform means we deliver faster and at lower cost than an OEM system, with the same engineering rigor behind every tool.
Discuss a Custom Configuration
Equipment
Available photolithography systems
A sample of current inventory. Browse the full catalog for live availability, or request a quote on any system.
Canon FPA-3000 System
Illumination Source (nm)
Projection Ratio
Numerical Aperture
Field (mm)
Resolution (nm)
Intensity (≥W/m2)
Uniformity (≤%)
Alignment Accuracy (<nm)
Stage Type
Wafer Size (in)
Reticle Size (in)
Throughput (WPH, 8 in)
GCE Service
Status
Find Spare Parts
Spare parts for Canon FPA-3000 steppers
A comprehensive spare-parts inventory for the FPA-3000 line: wafer and reticle handling, stage, optics and illumination, and electronics and controls. Most parts are functionally tested on GCE's in-house FPA-3000 equipment before they ship.
Find parts by model
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EX3
FPA-3000 EX3
EX4
FPA-3000 EX4
EX5
FPA-3000 EX5
EX6
FPA-3000 EX6
i4
FPA-3000 i4
i5
FPA-3000 i5
i5+
FPA-3000 i5+
i5++
FPA-3000 i5++
iW
FPA-3000 iW
Why GCE for Photolithography
Deep, platform-specific expertise on every FPA-3000 that comes through GCE
As equipment manufacturers shift focus to current-generation tools, legacy platforms like the FPA-3000 often move down their priority list. That's the gap GCE fills. We've made the FPA-3000 a core focus, not an afterthought, for 25 years.
125+ Canon FPA-3000 projects
completed across GCE's history.
Turnkey delivery in as little as three months
versus a year or more for a new tool, demonstrated on real customer deployments.
Backed by a dedicated Canon parts inventory
Refurbishment, reconfiguration, and field service, all supported by GCE's own FPA-3000 parts stock.
Validated to OEM performance standards
Every system tested on our own line.
GCE refurbishes, reconfigures, installs, and supports every FPA-3000. The same engineers handle each stage, backed by a spare-parts inventory built specifically for this platform. OEM-caliber engineering, without the wait or the price tag of going through the OEM.
See Why Refurbished
Case study
Photolithography in the field
One real engagement, told straight. Names stay anonymized at the customer's request the technical detail is what matters.
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Connect
Need a specific configuration? Tell us what you’re running
Give us your wafer size, exposure type, and process, and we'll spec the right system in stock or sourced. We respond within one business day.
Demos available on request, no obligation. Just have a spec question? Talk to an Engineer