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Serviced by GCE
KLA-Tencor 8100 CD-SEM
Wafer size
3", 4", 6", 8"
Resolution (nm)
4.5
Throughput (WPH 8")
40
Accelerating Voltage (kV)
0.4–1.5
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E-Beam Metrology
Refurbished e-beam metrology — restored, reconfigured, and supported.
CD-SEMs for critical-dimension measurement, refurbished to original performance and shipped with warranty.
About e-beam metrology
What is e-beam metrology?
E-beam metrology is the use of a focused electron beam to measure features on a semiconductor wafer. Because an electron beam resolves far smaller features than light, it measures structures well below the limits of optical metrology. In a fab, e-beam metrology verifies that the patterns printed by lithography and etch match the intended design, feature by feature, wafer by wafer.
What is a CD-SEM?
A CD-SEM, critical-dimension scanning electron microscope, is the tool that performs these measurements. It scans an electron beam across the wafer to image and measure critical dimensions: line widths, spaces, contact and via sizes, and line edge roughness. CD-SEMs are non-destructive and run inline, so wafers continue through the process after measurement. The KLA CD-SEMs GCE refurbishes handle wafers from 3″ to 8″.
Why measure critical dimensions?
Critical dimension is the smallest controlled feature size in a process. If it drifts, yield drops. CD-SEM measurement is how a fab catches that drift early, confirming the line is in spec and keeping the process stable run to run.
See the KLA CD-SEM model line
KLA CD-SEM
6 models
+ More brands
Coming soon
KLA CD-SEM series refurbished and reconfigured by GCE.
GCE holds one of the largest parts inventories in the world for the KLA CD-SEM family, and we've worked this platform since our first one in 2003. We refurbish the line to original performance, reconfigure for wafer size, substrate, and application, and ship every system with warranty. Each is tested on our own line before it leaves. These tools handle silicon and compound-semiconductor wafers alike: Si, SiC, GaN, GaAs, InP, sapphire, and quartz.
Serviced by GCE
KLA-Tencor 8100E CD-SEM
Wafer size
3", 4", 6", 8"
Resolution (nm)
4
Throughput (WPH 8")
50
Accelerating Voltage (kV)
0.4–1.5
Serviced by GCE
KLA-Tencor 8100XP CD-SEM
Wafer size
3", 4", 6", 8"
Resolution (nm)
4
Throughput (WPH 8")
50
Accelerating Voltage (kV)
0.4–1.5
All KLA CD-SEMs GCE refurbishes handle wafers from 3″ to 8″ across Si, SiC, GaN, GaAs, InP, sapphire, and quartz. Reconfiguration available across wafer size, substrate, and application.
Browse all metrology systems
Metrology Services
What GCE actually does to a KLA CD-SEM.
These are services on the equipment. We refurbish, reconfigure, install, service, and relocate the tool itself. Wedon't perform metrology measurements or run your process.
Refurbishment, system by system
Every CD-SEM that leaves GCE goes through full component-level rework, not a surface reconditioning
Electron column & source
New electron source installed. Schottky gun controller and Wien filterrefurbished and tuned for optimal performance. New 14-hole aperture strip installed.
Detection & imaging
Detector assembly fully refurbished with new PMT and scintillator.
Stage & vacuum systems
X and Y stage motors replaced. Chamber vacuum feedthrough assembliesreplaced with new. Refurbished turbo pump installed. PAT tests performed for stage qualification. On8250 systems, a new Zygo laser supports the platform's laser-guided stage.
Wafer & reticle handling
Robot, robot controller, and pre-aligner rebuilt and re-calibrated. End effectorinspected and replaced if required.
Controls & electronics
Detector controller and DC power supply refurbished and tuned. All wiring,tubing, and mechanical assemblies inspected and repaired or replaced as required.
Final qualification
Load ports calibrated to the customer's specified wafer size and type, with pipelinecycle tests run to confirm flawless operation in full automation. Tool qualified against imaging andresolution specifications.
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Reconfiguration, by wafer size, substrate, and application
Every CD-SEM is reconfigured to the customer's actual process, not shipped as a fixed configuration. GCE adjustswafer size, substrate compatibility (silicon, SiC, GaN, GaAs, InP, sapphire, quartz), and application-specific setup,including load port calibration and automation cycle testing for the customer's production environment.
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On-site field service
GCE's field engineers work on CD-SEMs already running in the field, not just in our shop:
Electron column troubleshooting: Wien filter tuning, stigmator adjustment, extraction current andvoltage checks
Gun recovery and tip reset procedures
Aperture alignment
Engineering solutions for obsolete components. When an original part is no longer available, ourengineers have designed working replacements, including an interface kit for a discontinued ion pumpcontroller, keeping tools running that the OEM no longer supports.
Continuous improvement upgrades
Beyond restoring a tool to OEM spec, GCE offers upgrades that modernize it further: a new PC and systemcontroller for higher speed and throughput, an ion pump controller upgrade to a current model, and waferbarcode scanner integration.
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Installation, turnkey delivery & relocation
GCE's own field engineers install and qualify every CD-SEM on-site, validated against the same OEM specificationused during in-house refurbishment. When a tool needs to move instead, GCE handles the full relocation: de-installation, packaging, transport, and reinstallation and re-qualification to spec at the new facility. GCE hasdelivered turnkey CD-SEM systems and relocations across the world. See De-installation & Relocation for the fullprocess.
GCE has worked on this platform since 2003. That depth means we deliver faster and at lower cost than an original performance system, with the same engineering rigor behind every tool.
Discuss a Custom Configuration
Equipment
Available e-beam metrology systems.
A sample of current inventory. Browse the full catalog for live availability, or request a quote on any system.
System
Wafer Size (in)
Wafer Types
Size/Type Mix & Match
Wafer Loading Stations
Reticle Loading Stations
Reticle Size (in)
Feature Size (nm)
Resolution (nm)
Schottky Electron Source
Magnification (kX)
Operating System
Stage Accuracy (µm)
Accelerating Voltage (kV)
Throughput (WPH, 8 in)
GCE Service
Status
8100
3", 4", 6", 8"
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Yes
3
100
4.5
Yes
2.34–400
Mac
10
0.4–1.5
40
Yes
Available to Source
8100E
3", 4", 6", 8"
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Yes
3
30
4
Yes
2.34–400
Mac, Win NT/XP
10
0.4–1.5
50
Yes
In Stock
8100XP
3", 4", 6", 8"
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Yes
3
30
4
Yes
2.34–400
Mac, Win NT/XP
10
0.4–1.5
50
Yes
In Stock
8100XPR
3", 4", 6", 8"
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Yes
1–2
1–2
5–6
30
4
Yes
2.34–400
Mac, Win NT/XP
10
0.4–1.5
50
Yes
In Stock
8250
3", 4", 6", 8"
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Yes
3
30
4
Yes
2.34–400
Win NT/XP
1 (laser guided)
0.4–1.5
55
Yes
In Stock
8250R
3", 4", 6", 8"
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Yes
1–2
1–2
5–6
30
4
Yes
2.34–400
Win NT/XP
1 (laser guided)
0.4–1.5
55
Yes
In Stock
Find Spare Parts
Spare parts for KLA CD-SEMs.
A comprehensive spare-parts inventory for the KLA CD-SEM line: electron-column components, wafer and reticle handling, stage and vacuum systems, detectors, and electronics and controls. Parts are functionally tested on GCE's in-house CD-SEM equipment before they ship.
Find parts by model
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8100
CD-SEM 8100
8100E
CD-SEM 8100E
8100XP
CD-SEM 8100XP
8100XPR
CD-SEM 8100XPR
8250
CD-SEM 8250
8250R
CD-SEM 8250R
Why GCE for E-Beam Metrology
Deep, platform-specific expertise on every CD-SEM that comes through GCE.
As equipment manufacturers shift focus to current-generation tools, legacy platforms like the KLA 8100XP and 8250 often move down their priority list. That's the gap GCE fills. We've supported these platforms since 2003, holding one of the largest KLA 8100XP/8250 equipment and parts inventories in the world.
100+ KLA CD-SEM projects
completed, refurbishment, reconfiguration, installation, and field service.
Since 2003
dedicated experience on the KLA 8100XP and 8250 platforms specifically.
Real engineering, not just resale.
When an OEM part goes obsolete, GCE has designed working replacements to keep tools running.
Validated to OEM performance standards.
Every system tested on our own line.
GCE refurbishes, reconfigures, installs, and supports every FPA-3000. The same engineers handle each stage, backed by a spare-parts inventory built specifically for this platform. OEM-caliber engineering, without the wait or the price tag of going through the OEM.
See Why Refurbished
Case study
Photolithography in the field.
One real engagement, told straight. Names stay anonymized at the customer's request the technical detail is what matters.
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Connect
Need a CD-SEM for a specific wafer and process? Tell us what you're measuring.
Give us your wafer size, substrate, and measurement needs, and we'll spec the right system — in stock or sourced. We respond within one business day.
Demos available on request, no obligation. Just have a spec question? Talk to an Engineer