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Available to Source
Serviced by GCE
Canon FPA-3000 EX3 Wafer Stepper
Light source (nm)
248
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
250
Throughput (WPH 8")
57
Equipment Catalog
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Refurbished Canon wafer steppers and KLA CD-SEMs, in stock or available to source. Filter by wafer size, node, application, and availability to find the system you need.
0 systems
Available to Source
Serviced by GCE
Canon FPA-3000 EX4 Wafer Stepper
Light source (nm)
248
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
250
Throughput (WPH 8")
75
In Stock
Serviced by GCE
Canon FPA-3000 EX5 Wafer Stepper
Light source (nm)
248
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
220
Throughput (WPH 8")
85
Available to Source
Serviced by GCE
Canon FPA-3000 EX6 Wafer Stepper
Light source (nm)
248
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
180
Throughput (WPH 8")
120
In Stock
Serviced by GCE
Canon FPA-3000 i4 Wafer Stepper
Light source (nm)
365
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
350
Throughput (WPH 8")
59
Available to Source
Serviced by GCE
Canon FPA-3000 i5 Wafer Stepper
Light source (nm)
365
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
350
Throughput (WPH 8")
74
Available to Source
Serviced by GCE
Canon FPA-3000 i5+ Wafer Stepper
Light source (nm)
365
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
350
Throughput (WPH 8")
100
Available to Source
Serviced by GCE
Canon FPA-3000 i5++ Wafer Stepper
Light source (nm)
365
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
350
Throughput (WPH 8")
110
Available to Source
Serviced by GCE
Canon FPA-3000 iW Wafer Stepper
Light source (nm)
365
Wafer sizes (in)
4", 6", 8"
Resolution (nm)
800
Throughput (WPH 8")
115
Available to Source
Serviced by GCE
KLA-Tencor 8100 CD-SEM
Wafer sizes (in)
3", 4", 6", 8"
Resolution (nm)
4.5
Throughput (WPH 8")
40
Accelerating Voltage (kV)
0.4–1.5
In Stock
Serviced by GCE
KLA-Tencor 8100E CD-SEM
Wafer sizes (in)
3", 4", 6", 8"
Resolution (nm)
4
Throughput (WPH 8")
50
Accelerating Voltage (kV)
0.4–1.5
In Stock
Serviced by GCE
KLA-Tencor 8100XP CD-SEM
Wafer sizes (in)
3", 4", 6", 8"
Resolution (nm)
4
Throughput (WPH 8")
50
Accelerating Voltage (kV)
0.4–1.5
In Stock
Serviced by GCE
KLA-Tencor 8100XPR CD-SEM
Wafer sizes (in)
3", 4", 6", 8"
Resolution (nm)
4
Throughput (WPH 8")
50
Accelerating Voltage (kV)
0.4–1.5
In Stock
Serviced by GCE
KLA-Tencor 8250 CD-SEM
Wafer sizes (in)
3", 4", 6", 8"
Resolution (nm)
4
Throughput (WPH 8")
55
Accelerating Voltage (kV)
0.4–1.5
In Stock
Serviced by GCE
KLA-Tencor 8250R CD-SEM
Wafer sizes (in)
3", 4", 6", 8"
Resolution (nm)
4
Throughput (WPH 8")
55
Accelerating Voltage (kV)
0.4–1.5
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