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Serviced by GCE
KLA 0133889-000
Stage Controller, Equipe
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
KLA-Tencor 8100XP CD-SEM
KLA-Tencor 8100XP CD-SEM measures 30 nm features at up to 50 wafers per hour, with three wafer loading stations and a Schottky electron source. Handles 3in to 8in wafers across silicon and compound semiconductor substrates.
KLA-Tencor 8100XP CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.
Chamber pump: Edwards or Varian dry scroll pump.
Load lock pump: Edwards or Varian dry scroll pump.
Dedicated UPS system for emergency power back up.
Power: 120V-220VAC, 1PH, 50/60HZ .
Guaranteed to be in full compliance with original new tool specifications Full acceptance testing prior to shipment. Installation, start up, & training at customer's facility worldwide.
Specifications
Brand
KLA
Model
CD-SEM 8100XP
Model Year
Several
Category
E-Beam Metrology
Serial Number
Several
Resolution
4
Throughput (WPH 8")
50
Wafer Sizes
3", 4", 6", 8"
Wafer types
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Wafer Loading Stations
3
Feature Size (nm)
30
Resolution (nm)
4
Magnification (kX)
2.34–400
Stage Accuracy (um)
10
Accelerating Voltage (kV)
0.4–1.5
Operating System
Mac, Win NT/XP
Schottky Electron source
Yes
Size/Type Mix & Match on the Fly
Yes
Configuration / Reconfiguration
What GCE can adapt on this system.
This isn't a fixed listing. We reconfigure the tool for the process you're actually going to run — a different wafer size, a different application, a substrate the previous owner never used. Every system is refurbished to OEM spec first; the configuration work is where we match it to your line.
Wafer size
reconfigure across
3", 4", 6", 8"
Application
configured for
KLA-Tencor 8100XP CD-SEM
Compound-semiconductor substrates
SiC, GaN, GaAs, InP, sapphire, quartz, where the platform supports it.
Spare Parts
Spare parts for this system
Serviced by GCE
KLA 0145906-001
Aperture Strip Assembly, 14 holes
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 0723-2024-001
IP Controller Interface Kit (with new controller)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 130-00679-000
Feedthrough
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA 371-07734-000
Scintillator
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 460-15018-000
Image / Frame Grabber PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA 471-12148-000
Zygo 7705, Laser Head
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 720-02841-500
Stage Motor, Brushed
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Request this system.
In stock, refurbished to OEM spec, and demo-ready on our own line. Ask for a quote, or schedule a demo and watch it run before you commit — no obligation.
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