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Serviced by GCE
Canon 610 Test Reticle
Test/Calibration Reticle, 5X
Compatibility
Canon FPA-3000
Condition
Removed from working system
Canon FPA-3000 EX6 Wafer Stepper
Canon FPA-3000 EX6 is the highest resolution stepper in the FPA-3000 line, a 248 nm KrF tool resolving 180 nm at 0.45 to 0.65 NA and running up to 120 wafers per hour.
Not currently in GCE inventory, but fully supported for service, reconfiguration, and parts on your existing unit.
Specifications
Brand
Canon
Model
FPA-3000 EX6
Category
Photolithography
Illumination Source
248
Projection Ratio
5:1
Numerical Aperture
0.45–0.65
Field
22 x 22
Intensity (≥W/m²)
5,000
Uniformity (≤%)
1.0
Alignment Accuracy (<nm)
25
Stage Type
Flat
Reticle size (inches)
6
Resolution
180
Throughput (WPH 8")
120
Wafer Sizes
4", 6", 8"
Resolution (nm)
180
Configuration / Reconfiguration
What GCE can adapt on this system.
This isn't a fixed listing. We reconfigure the tool for the process you're actually going to run — a different wafer size, a different application, a substrate the previous owner never used. Every system is refurbished to OEM spec first; the configuration work is where we match it to your line.
Wafer size
reconfigure across
4", 6", 8"
Application
configured for
Canon FPA-3000 EX6 Wafer Stepper
Compound-semiconductor substrates
SiC, GaN, GaAs, InP, sapphire, quartz, where the platform supports it.
Spare Parts
Spare parts for this system
Serviced by GCE
Canon 735 Test Reticle
Focus/Resolution Reticle, 5X
Compatibility
Canon FPA-3000
Condition
New
Serviced by GCE
Canon Bar Code Reader
Bar Code Reader for Reticle Cassette
Compatibility
Canon FPA-3000
Condition
New
Serviced by GCE
Canon BF6-2580
FRA cable
Compatibility
Canon FPA-3000
Condition
Removed from working system
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Serviced by GCE
Canon BG3-1045
Ref-Mem(RT) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
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Serviced by GCE
Canon BG3-1050
CAP4 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-1360
Robot Controller PCB for RC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Request this system.
In stock, refurbished to OEM spec, and demo-ready on our own line. Ask for a quote, or schedule a demo and watch it run before you commit — no obligation.
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