%20(1)-p-500.png)
.webp)
Serviced by GCE
Canon 610 Test Reticle
Test/Calibration Reticle, 5X
Compatibility
Canon FPA-3000
Condition
Removed from working system
Canon FPA-3000 EX5 Wafer Stepper
Canon FPA-3000 EX5 is a 248 nm KrF stepper resolving 220 nm at 0.45 to 0.63 NA, running up to 85 wafers per hour over a 22 x 22 mm field.
This stepper is installed and powered up at our facility in Blackwood, NJ, USA. Our team is currently going through start-up and operational checks. Light Source KrF Excimer Laser CYMER/ELS-53XX (Not Included).
Specifications
Brand
Canon
Model
FPA-3000 EX5
Model Year
1998
Category
Photolithography
Serial Number
8095011
Illumination Source
248
Projection Ratio
5:1
Numerical Aperture
0.45–0.63
Field
22 x 22
Intensity (≥W/m²)
3,500
Uniformity (≤%)
1.0
Alignment Accuracy (<nm)
45
Stage Type
Flat
Reticle size (inches)
6
Resolution
220
Throughput (WPH 8")
85
Wafer Sizes
4", 6", 8"
Resolution (nm)
220
Configuration / Reconfiguration
What GCE can adapt on this system.
This isn't a fixed listing. We reconfigure the tool for the process you're actually going to run — a different wafer size, a different application, a substrate the previous owner never used. Every system is refurbished to OEM spec first; the configuration work is where we match it to your line.
Wafer size
reconfigure across
4", 6", 8"
Application
configured for
Canon FPA-3000 EX5 Wafer Stepper
Compound-semiconductor substrates
SiC, GaN, GaAs, InP, sapphire, quartz, where the platform supports it.
Spare Parts
Spare parts for this system
Serviced by GCE
Canon 735 Test Reticle
Focus/Resolution Reticle, 5X
Compatibility
Canon FPA-3000
Condition
New
Serviced by GCE
Canon Bar Code Reader
Bar Code Reader for Reticle Cassette
Compatibility
Canon FPA-3000
Condition
New
Serviced by GCE
Canon BF6-2580
FRA cable
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG3-1045
Ref-Mem(RT) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG3-1050
CAP4 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-1360
Robot Controller PCB for RC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Request this system.
In stock, refurbished to OEM spec, and demo-ready on our own line. Ask for a quote, or schedule a demo and watch it run before you commit — no obligation.
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.