Canon FPA-3000 EX5 Wafer Stepper

Canon FPA-3000 EX5 KrF (248 nm) DUV stepper, installed and powered up at our lab in Blackwood, New Jersey. We are completing start-up and operational checks and can share performance data on request once they are done. The KrF excimer laser light source (Cymer ELS-53XX) is not included.

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We refurbish at the component level across every major subsystem, including optics and illumination, wafer and reticle handling, stages, and controls and electronics. Final calibration and qualification confirm performance equal to or better than the original specification.

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We can reconfigure the system for 100, 150 or 200 mm wafers and for silicon, SiC, GaN, GaAs, sapphire or quartz substrates. Our engineers install and qualify it at your site and train your staff. We also provide ongoing preventive maintenance, remote diagnostics and on-site repair, and we handle relocation, including international moves. The tool ships with our warranty.

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Related case study: Five-tool Canon FPA-3000 fleet delivered at 80% below new-tool cost →