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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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0 systems
Canon BG3-3830
Ready to Ship
Serviced by GCE

Canon BG3-3830

IO-DSP PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3831
Ready to Ship
Serviced by GCE

Canon BG3-3831

RT-DSP PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3832
Ready to Ship
Serviced by GCE

Canon BG3-3832

CDIF4 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3833
Ready to Ship
Serviced by GCE

Canon BG3-3833

STG-Preamp PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3854
Ready to Ship
Serviced by GCE

Canon BG3-3854

Power Supply, PM2415

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3861
Ready to Ship
Serviced by GCE

Canon BG3-3861

DCON1 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3862
Ready to Ship
Serviced by GCE

Canon BG3-3862

DCON2 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3863
Ready to Ship
Serviced by GCE

Canon BG3-3863

DLED PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-5026
Ready to Ship
Serviced by GCE

Canon BG3-5026

BG3-5026

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-5181
Ready to Ship
Serviced by GCE

Canon BG3-5181

EALSCD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-5450
Refurbishment Service
Serviced by GCE

Canon BG3-5450

Exposure Shutter Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG3-5526
Ready to Ship
Serviced by GCE

Canon BG3-5526

Main Cam PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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