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.webp)
Ready to Ship
Serviced by GCE
Canon X-Term Kit
X-Terminal Solution for i5, 17in Monitor
Compatibility
Canon FPA-3000
Condition
New
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Ready to Ship
Serviced by GCE
Canon XY Stage
Wafer Stage for Canon Stepper
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon XY Stage with Tilt Stage
XY stage with linear motor and tilt stage
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y60-0812
Z Ball Screw Unit (Ball Cage)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y60-0883
ALS Shutter Unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y60-1244
X-Bar Mirror
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y60-1245
Y-Bar Mirror
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y60-2160
Tilt piezo unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y60-2273
Cable
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6026
Power Supply, PM11 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6027
Power Supply, PM1, PM2, PM14, PM22, or PM31 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6028
Power Supply, PM13, PM15, PM23, or PM32 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6029
Power Supply, PM24 or PM25 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6030
Power Supply, PM26 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6031
Power Supply, PM21 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6032
Power Supply, PM36 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6033
Power Supply, PM16 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6034
Power Supply, PM34 or PM35 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6035
Power Supply, W33 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Y75-6036
Power Supply, PDU1 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Credence ASIC Chip
ASIC Chip, MSI part# MSICBB
Compatibility
Credence Kalos 1
Condition
New
Ready to Ship
Serviced by GCE
Credence DPS2
DPS2 module, Kalos 2
Compatibility
Credence Kalos 2
Condition
Removed from working system
Ready to Ship
Serviced by GCE
KLA 0133889-000
Stage Controller, Equipe
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 0145906-001
Aperture Strip Assembly, 14 holes
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA 0723-2024-001
IP Controller Interface Kit (with new controller)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA 130-00679-000
Feedthrough
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 371-07734-000
Scintillator
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA 460-15018-000
Image / Frame Grabber PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 471-12148-000
Zygo 7705, Laser Head
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA 720-02841-500
Stage Motor, Brushed
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-02964-000
Picoammeter II
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-03775-000
Metrofocus PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-05721-000
Column Control Chassis I (CCC I)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-05888-000
TFE Gun Controller (EB4)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-06888-000
Focus Control Board (FCB)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-06914-000
Picoammeter III
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-07707-001
Docking Valve Assembly (Locking Cylinder)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-09841-001
Wehnhelt / Condenser Power Supply
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
KLA 720-12647-000
Energy Filter
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-17255-000
Robot End Effector
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 720-17259-000
Stage Controller, MEI
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-08568-000
Piezo Controller
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-08986-000
ET Detector Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-10727-002
HCI PCB (Hardware Control Interface)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-13181-000
DC Distribution Chassis (DCPS)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-13182-000
ET Detector Controller (ETDC)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-13204-000
Schottky Gun Controller Chassis (SGCC)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-14016-000
ISA Bus Chassis
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Ready to Ship
Serviced by GCE
KLA 780-14091-000
Column Control Chassis II (CCCII)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-14680
Stage Motor, Brushless
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-14688-000
Wien Filter Controller (WFCC)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
KLA 780-14691-000
MCP Detector Controller (EB3)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-14810-000
Robot Controller
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 780-15186-000
Transfer Arm, Ceramic
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 780-17142-000
Wafer Pre-Aligner
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
.webp)
TBD
Serviced by GCE
KLA 780-17407-000
Dual Ion Pump Controller
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 810-06465-000
Motor control cable from controller to HCI
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 810-06466-000
Motor encoder cable from controller to each motor
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 810-06475-000
Video Cable, Detector Amplifier to Computer
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 810-06504-000
Reach aperture motor cable
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 810-06575-000
Cable from Detector to Detector Amplifier
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 810-13180-000
Coax Cable, piezo to FCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 810-17212-000
Video Bundle Cable, interface for STB and Frame Grabber
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 820-07076-000
Gauge PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA 880-50510-000
Electron Source Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Aperture Motor Assembly
Aperture Motor Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Baking Kit
Baking Kit for bake out of Electron Source Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA Cable for Robot
Cable from Robot controller to Robot
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Cable HV Scint to ETDC
Cable, HV Scint to ETDC
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Camera Assembly
Camera Assembly, high and low magnification
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Canister
Canister to cap the eGun
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Removed from working system
Ready to Ship
Serviced by GCE
KLA CDSEM-IF PCB
Interface PCB for MAC controller
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA CeQ-001
Charge Equalization System, hardware
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Chamber Floatation Valve
Chamber Floatation Valve
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Coax Video Cable
Coax cable for Optical Camera
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Column Isolation Valve Assembly
Column Isolation Valve Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Elevator Assembly
Elevator Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA End Effector
End Effector for Robot
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA EOB Cable
EOB cable for interconnection of Electron Optic Bus
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Flexible Circuit Card
Flexible Circuit Card for stage high voltage connection
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Friction Pads
Friction Pads, one set, for use on wafer stage
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA Interconnect PCB
Interconnect PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA LED Assembly
LED assembly for Light Optics, housing included
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Lens Assembly
Lens Assembly, including Octopule and Wien Filter
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA LidLift-001
Chamber Lid Lift Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Mac Controller Upgrade
MAC G3 controller upgrade hardware
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Manual Isolation Valve
Manual Isolation Valve for Column Ion Pump
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Metrocal Wafer
Metrocal Wafer for calibration
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA Optical Column Assembly
Optical Column Assembly, camera not included
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA PC6392 Metrabyte PCB
Serial Driver PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA PC Upgrade
Modernization of Windows PC Controller System
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA Pfeiffer TCP-380
Turbo pump controller
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
KLA Piezo Z Stage Assembly
Piezo Z Stage Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Recipe Server
Recipe Server
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA Robot
Main Robot
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA Shipping Braces
Shipping Braces for system lockdown during transport
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
KLA SSD Drive
SSD upgrade hardware for MAC
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA Starcell 20
Ion Pump, Column
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Ready to Ship
Serviced by GCE
KLA Starcell 55
Ion Pump, Chamber
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
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