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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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0 systems
Canon BG3-2098
Ready to Ship
Serviced by GCE

Canon BG3-2098

Main Adopter PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2099
Ready to Ship
Serviced by GCE

Canon BG3-2099

CDIF Adopter PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2175
Ready to Ship
Serviced by GCE

Canon BG3-2175

IL1-C/D PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2189
Ready to Ship
Serviced by GCE

Canon BG3-2189

Damper-CD3 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2247
Ready to Ship
Serviced by GCE

Canon BG3-2247

X-Terminal Monitor, Color

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2462
Ready to Ship
Serviced by GCE

Canon BG3-2462

Main CPU

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG3-2537
Ready to Ship
Serviced by GCE

Canon BG3-2537

IL-3 CD PCB Assembly, EX4

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2562
Ready to Ship
Serviced by GCE

Canon BG3-2562

E-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG3-2649
Ready to Ship
Serviced by GCE

Canon BG3-2649

CAP5 PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2794
Ready to Ship
Serviced by GCE

Canon BG3-2794

IL5-C/D PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2800
Ready to Ship
Serviced by GCE

Canon BG3-2800

MB-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-2898
Refurbishment Service
Serviced by GCE

Canon BG3-2898

Masking Blade

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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