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.webp)
Refurbishment Service
Serviced by GCE
Canon BG4-6703
Masking Blade
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
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Ready to Ship
Serviced by GCE
Canon BG4-6704
IL C/D PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6705
IL2 C/D PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6724
Reticle control interface PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6728
RS PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6735
Robot, Reticle
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6736
Robot, Reticle Cassette
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG4-6745
Reticle Control CPU PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG4-6746
WF/RC IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6748
P2 Back Plane PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-6751
Reticle Robot Hand, 6in
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6755
SH PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6763
Pre-Aligner, 8in, Notch
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-6764
End effector, 3in - 4in
Compatibility
Canon FPA-3000
Condition
New
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6765
End effector, 5in - 8in
Compatibility
Canon FPA-3000
Condition
New
Ready to Ship
Serviced by GCE
Canon BG4-6777
Feed Hand Unit (Type 6 L)
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Refurbishment Service
Serviced by GCE
Canon BG4-6780
Robot, SCH (L)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6789
WF LD/PD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6794
WF SCH/EL PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6811
PA/SH PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6823
WF CPU PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6894
A-scope left relay lens
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-6902
ASCD(L) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6903
ASCD(R) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6928
URS CD PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6943
ALS CD PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6974
E-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-7001
RS-232C Switching PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-7073
Mount
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Refurbishment Service
Serviced by GCE
Canon BG4-7082
Lamp power supply for 2kW Mercury Lamp
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-7165
BG4-7165
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-7329
PPC PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Refurbishment Service
Serviced by GCE
Canon BG4-7521
Robot, SCH (R)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-7581
QCD-3 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-7937
CAP2, CCD OPTF PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-7938
HROA CD2 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-8182
CD80-CD2 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-8192
Intermediate Library CTRL PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-8193
Library, Elevator Control PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-8195
N6in INT-LIB Control PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-8224
M-POS CD PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-8591
EASL-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-8592
EASR-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-8605
Y Drive Motor
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-8680
EXPO-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-8705
MV-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG4-8815
CDIF2 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG4-9151
Schottky Electron Source Controller Chassis
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9152
Stage Piping PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
%202.webp)
Refurbishment Service
Serviced by GCE
Canon BG4-9171
AC/DC Power Supply Unit, D-Rack (Alt# BG3-6705, BH5-3553)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-9175
MLE IF PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG4-9191
Schottky Electron Source Controller Chassis
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-9217
DSP
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9218
MLE-Intermediate PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9250
IL2A CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-9265
Slave Unit for Remote Terminal
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-9296
Linear Motor Driver PCB (XY) - for EX5
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9299
Linear Motor Driver PCB (FZ) - for EX5
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9301
Linear Motor Drive, FZ-1, Theta-Drive
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9302
Linear Motor Drive, FZ-2, Z-Drive
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9307
CAP3 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9386
CD90-CD PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-9667
CD83-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-9715
ADP-2 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-9716
IMP3 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG4-9745
OFCD IF(2) PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG5-0009
Laser-IF (WLC), Measurement Board
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-0012
D-CON1 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-0013
D-CON2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG5-0015
RT-CPU PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG5-0025
Motor Driver Unit (WQMBY)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-0060
Main-Cam PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-0174
PA/SH PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-0429
AIN-IF3 PCB2 Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-0430
CDIF5 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-1255
WF-I/F PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-1256
RC-I/F PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-1262
MLE-IF2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-1890
Main Ref Mem PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-2509
Motor Driver Unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG5-3342
BG5-3342
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG6-3046
Ceramic finger
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Ready to Ship
.webp)
Ready to Ship
Serviced by GCE
Canon BG9-3500
ADP-2 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG9-3501
IMP2 PCB (alt# BG4-9716)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG9-3502
ACC-I (1) PCB Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG9-4084
ACC-1 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG9-4085
ACC-2 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG9-4147
Extension PCB Assembly, M3 DRV.PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG9-4152
PCB, Extension
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BH2-9114
Motor Driver Unit, AC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BH5-3739
Driver
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BH5-4221
X Terminal Monitor, Black & White
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BH5-6240
Stage Sensor Box
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BH9-0069
SCSI Extender PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BM3-8923
BM3-8923
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon Chuck Maintenance Kit
Chuck Maintenance Kit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Lockdown Kit
Lockdown Kit for system lockdown during transport
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon Reticle Reference Marks EX5
Reticle Reference Marks, EX5
Compatibility
Canon FPA-3000
Condition
Removed from working system
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