%20(1)-p-500.png)
.jpg)
.webp)
Ready to Ship
Serviced by GCE
Canon 610 Test Reticle
Test/Calibration Reticle, 5X
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Ready to Ship
Serviced by GCE
Canon 735 Test Reticle
Focus/Resolution Reticle, 5X
Compatibility
Canon FPA-3000
Condition
New
Ready to Ship
Serviced by GCE
Canon Bar Code Reader
Bar Code Reader for Reticle Cassette
Compatibility
Canon FPA-3000
Condition
New
Ready to Ship
Serviced by GCE
Canon BF6-2580
FRA cable
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-1045
Ref-Mem(RT) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-1050
CAP4 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-1360
Robot Controller PCB for RC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-1406
REF-MEM PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-1407
Image Processing PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-2090
M-POS PCB-3 Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-2098
Main Adopter PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-2099
CDIF Adopter PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-2175
IL1-C/D PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-2189
Damper-CD3 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-2247
X-Terminal Monitor, Color
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-2462
Main CPU
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG3-2537
IL-3 CD PCB Assembly, EX4
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-2562
E-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-2649
CAP5 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-2794
IL5-C/D PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-2800
MB-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Refurbishment Service
Serviced by GCE
Canon BG3-2898
Masking Blade
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-3002
LM AMP
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3004
Damper CD5 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3014
M-POS PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3047
ECM-CD5 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-3048
ECI-CD5 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Refurbishment Service
Serviced by GCE
Canon BG3-3074
AC/DC Power Supply (E-Box)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-3088
MV-CD3 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3089
Stage CD2 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3122
STG BB PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3336
EXP CD PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3357
URS-CD(EX) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-3424
Distribution PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG3-3521
FZANA 2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3526
Stage DSP PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-3607
HL(M) IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3608
HL(S) IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3822
DMP-PRE PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-3823
DMP-DSP PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3824
AIN-IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3825
MLE-IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-3826
Laser-IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3827
Measurement PCB XY (ZMI 2004)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3828
Laser-IF PCB Assembly (R)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3829
Laser-IF PCB Assembly (Z)
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-3830
IO-DSP PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-3831
RT-DSP PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3832
CDIF4 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3833
STG-Preamp PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3854
Power Supply, PM2415
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3861
DCON1 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3862
DCON2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-3863
DLED PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-5026
BG3-5026
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-5181
EALSCD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Refurbishment Service
Serviced by GCE
Canon BG3-5450
Exposure Shutter Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-5526
Main Cam PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-5879
Wafer Chuck, Pin, 8in
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-6320
EC12 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-6612
RCS PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
%202.webp)
Refurbishment Service
Serviced by GCE
Canon BG3-6705
AC/DC Power Supply Unit, D-Rack (Alt# BG4-9171, BH5-3553)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG3-6748
SCH EL PCB 2 Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG3-7743
Image Processor 2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-7744
HRD2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG3-7795
EALSCD-PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-0993
BG4-0993
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-2102
TTL AF CPU PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-2766
5CH OPAF Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-2770-001
Linear Motor Driver PCB (X)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-2770-002
Linear Motor Driver PCB (Y)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-2817
XY Distributor PCB Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-3089
RC-2 PCB (2) Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-3323
Wafer Chuck, SiC, 4in
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-3669
IL C/D PCB Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-4930
XY Dist (Y) PCB Assembly W/Conn
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-5422
Theta piezo unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-5459
Piezo Analog PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6456
Stage DSP PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Ready to Ship
Serviced by GCE
Canon BG4-6457
XY Stage Pre-Amp PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6459
OFCD IF PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6460
Piezo Analog PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6463
Stage CD PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6465
Measurement PCB (X)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6466
Measurement PCB (Y)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6467
Measurement PCB (Theta)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6554
QCD-2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-6579
MV CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Ready to Ship
Serviced by GCE
Canon BG4-6582
HRD Processing Board
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-6590
P-Mount CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6596
M-POS PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Refurbishment Service
Serviced by GCE
Canon BG4-6601
D-Rack Power Supply (Alternate# BH5-3523)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6619
SNS Amp PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Ready to Ship
Serviced by GCE
Canon BG4-6626
Main CPU, i4
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6628
Cam Unit
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6629
XY Stage CPU PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6631
CDIF PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6632
TV Image CPU PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Ready to Ship
Serviced by GCE
Canon BG4-6673
HROA CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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