PLACEHOLDER — needs a Case Studies hero photo
Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
KLA Metrocal Wafer
Ready to Ship
Serviced by GCE

KLA Metrocal Wafer

Metrocal Wafer for calibration

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA Optical Column Assembly
Ready to Ship
Serviced by GCE

KLA Optical Column Assembly

Optical Column Assembly, camera not included

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA PC6392 Metrabyte PCB
Ready to Ship
Serviced by GCE

KLA PC6392 Metrabyte PCB

Serial Driver PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA PC Upgrade
Ready to Ship
Serviced by GCE

KLA PC Upgrade

Modernization of Windows PC Controller System

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA Pfeiffer TCP-380
Ready to Ship
Serviced by GCE

KLA Pfeiffer TCP-380

Turbo pump controller

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Piezo Z Stage Assembly
Ready to Ship
Serviced by GCE

KLA Piezo Z Stage Assembly

Piezo Z Stage Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Recipe Server
Ready to Ship
Serviced by GCE

KLA Recipe Server

Recipe Server

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA Robot
Ready to Ship
Serviced by GCE

KLA Robot

Main Robot

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Shipping Braces
Ready to Ship
Serviced by GCE

KLA Shipping Braces

Shipping Braces for system lockdown during transport

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA SSD Drive
Ready to Ship
Serviced by GCE

KLA SSD Drive

SSD upgrade hardware for MAC

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA Starcell 20
Ready to Ship
Serviced by GCE

KLA Starcell 20

Ion Pump, Column

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA Starcell 55
Ready to Ship
Serviced by GCE

KLA Starcell 55

Ion Pump, Chamber

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
Load more

Can't find the part you need?

Not all available inventory may appear in the current results. Update your filters or reach out to our team — we'll help you source the right part.

Browse All Parts
Request Support