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Serviced by GCE
KLA Elevator Assembly
Elevator Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
KLA End Effector
End Effector for Robot
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA EOB Cable
EOB cable for interconnection of Electron Optic Bus
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Flexible Circuit Card
Flexible Circuit Card for stage high voltage connection
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Friction Pads
Friction Pads, one set, for use on wafer stage
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA Interconnect PCB
Interconnect PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA LED Assembly
LED assembly for Light Optics, housing included
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Lens Assembly
Lens Assembly, including Octopule and Wien Filter
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA LidLift-001
Chamber Lid Lift Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Mac Controller Upgrade
MAC G3 controller upgrade hardware
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Manual Isolation Valve
Manual Isolation Valve for Column Ion Pump
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Metrocal Wafer
Metrocal Wafer for calibration
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
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