PLACEHOLDER — needs a Case Studies hero photo
Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
KLA 820-07076-000
Ready to Ship
Serviced by GCE

KLA 820-07076-000

Gauge PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 880-50510-000
Ready to Ship
Serviced by GCE

KLA 880-50510-000

Electron Source Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Aperture Motor Assembly
Ready to Ship
Serviced by GCE

KLA Aperture Motor Assembly

Aperture Motor Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Baking Kit
Ready to Ship
Serviced by GCE

KLA Baking Kit

Baking Kit for bake out of Electron Source Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA Cable for Robot
Ready to Ship
Serviced by GCE

KLA Cable for Robot

Cable from Robot controller to Robot

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Cable HV Scint to ETDC
Ready to Ship
Serviced by GCE

KLA Cable HV Scint to ETDC

Cable, HV Scint to ETDC

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Camera Assembly
Ready to Ship
Serviced by GCE

KLA Camera Assembly

Camera Assembly, high and low magnification

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Canister
Ready to Ship
Serviced by GCE

KLA Canister

Canister to cap the eGun

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Removed from working system
View Part
KLA CDSEM-IF PCB
Ready to Ship
Serviced by GCE

KLA CDSEM-IF PCB

Interface PCB for MAC controller

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA CeQ-001
Ready to Ship
Serviced by GCE

KLA CeQ-001

Charge Equalization System, hardware

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Chamber Floatation Valve
Ready to Ship
Serviced by GCE

KLA Chamber Floatation Valve

Chamber Floatation Valve

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Coax Video Cable
Ready to Ship
Serviced by GCE

KLA Coax Video Cable

Coax cable for Optical Camera

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
Load more

Can't find the part you need?

Not all available inventory may appear in the current results. Update your filters or reach out to our team — we'll help you source the right part.

Browse All Parts
Request Support