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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Filter systems

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0 systems
KLA 460-15018-000
Ready to Ship
Serviced by GCE

KLA 460-15018-000

Image / Frame Grabber PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 471-12148-000
Ready to Ship
Serviced by GCE

KLA 471-12148-000

Zygo 7705, Laser Head

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
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KLA 720-02841-500
Ready to Ship
Serviced by GCE

KLA 720-02841-500

Stage Motor, Brushed

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-02964-000
Ready to Ship
Serviced by GCE

KLA 720-02964-000

Picoammeter II

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 720-03775-000
Ready to Ship
Serviced by GCE

KLA 720-03775-000

Metrofocus PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-05721-000
Ready to Ship
Serviced by GCE

KLA 720-05721-000

Column Control Chassis I (CCC I)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 720-05888-000
Ready to Ship
Serviced by GCE

KLA 720-05888-000

TFE Gun Controller (EB4)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-06888-000
Ready to Ship
Serviced by GCE

KLA 720-06888-000

Focus Control Board (FCB)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 720-06914-000
Ready to Ship
Serviced by GCE

KLA 720-06914-000

Picoammeter III

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 720-07707-001
Ready to Ship
Serviced by GCE

KLA 720-07707-001

Docking Valve Assembly (Locking Cylinder)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 720-09841-001
Ready to Ship
Serviced by GCE

KLA 720-09841-001

Wehnhelt / Condenser Power Supply

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-12647-000
Ready to Ship
Serviced by GCE

KLA 720-12647-000

Energy Filter

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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