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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Filter systems

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Compatibility
Offering Type
Condition
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
KLA 720-17259-000
Ready to Ship
Serviced by GCE

KLA 720-17259-000

Stage Controller, MEI

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-08568-000
Ready to Ship
Serviced by GCE

KLA 780-08568-000

Piezo Controller

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-08986-000
Ready to Ship
Serviced by GCE

KLA 780-08986-000

ET Detector Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-10727-002
Ready to Ship
Serviced by GCE

KLA 780-10727-002

HCI PCB (Hardware Control Interface)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-13181-000
Ready to Ship
Serviced by GCE

KLA 780-13181-000

DC Distribution Chassis (DCPS)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-13182-000
Ready to Ship
Serviced by GCE

KLA 780-13182-000

ET Detector Controller (ETDC)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-13204-000
Ready to Ship
Serviced by GCE

KLA 780-13204-000

Schottky Gun Controller Chassis (SGCC)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14016-000
Ready to Ship
Serviced by GCE

KLA 780-14016-000

ISA Bus Chassis

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14020-000
Ready to Ship
Serviced by GCE

KLA 780-14020-000

Bladder

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA 780-14091-000
Ready to Ship
Serviced by GCE

KLA 780-14091-000

Column Control Chassis II (CCCII)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14680
Ready to Ship
Serviced by GCE

KLA 780-14680

Stage Motor, Brushless

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14688-000
Ready to Ship
Serviced by GCE

KLA 780-14688-000

Wien Filter Controller (WFCC)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
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