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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Canon BG4-7329
Ready to Ship
Serviced by GCE

Canon BG4-7329

PPC PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-7521
Refurbishment Service
Serviced by GCE

Canon BG4-7521

Robot, SCH (R)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-7581
Ready to Ship
Serviced by GCE

Canon BG4-7581

QCD-3 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-7937
Ready to Ship
Serviced by GCE

Canon BG4-7937

CAP2, CCD OPTF PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-7938
Ready to Ship
Serviced by GCE

Canon BG4-7938

HROA CD2 PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8182
Ready to Ship
Serviced by GCE

Canon BG4-8182

CD80-CD2 PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-8192
Ready to Ship
Serviced by GCE

Canon BG4-8192

Intermediate Library CTRL PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-8193
Ready to Ship
Serviced by GCE

Canon BG4-8193

Library, Elevator Control PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8195
Ready to Ship
Serviced by GCE

Canon BG4-8195

N6in INT-LIB Control PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-8224
Ready to Ship
Serviced by GCE

Canon BG4-8224

M-POS CD PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-8591
Ready to Ship
Serviced by GCE

Canon BG4-8591

EASL-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8592
Ready to Ship
Serviced by GCE

Canon BG4-8592

EASR-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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