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Serviced by GCE
Canon BG4-8680
EXPO-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
Canon BG4-8705
MV-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
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Serviced by GCE
Canon BG4-8815
CDIF2 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
%20(1).webp)
Serviced by GCE
Canon BG4-9151
FZANA PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-9152
Stage Piping PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
%202.webp)
Serviced by GCE
Canon BG4-9171
AC/DC Power Supply Unit, D-Rack (Alt# BG3-6705, BH5-3553)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-9175
MLE IF PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
%20(1).webp)
Serviced by GCE
Canon BG4-9191
XY PRE2 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-9217
DSP
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-9218
MLE-Intermediate PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-9250
IL2A CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-9265
Slave Unit for Remote Terminal
Compatibility
Canon FPA-3000
Condition
Removed from working system
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