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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Canon BG4-6628
Ready to Ship
Serviced by GCE

Canon BG4-6628

Cam Unit

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6629
Ready to Ship
Serviced by GCE

Canon BG4-6629

XY Stage CPU PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6631
Ready to Ship
Serviced by GCE

Canon BG4-6631

CDIF PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6632
Ready to Ship
Serviced by GCE

Canon BG4-6632

TV Image CPU PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6673
Ready to Ship
Serviced by GCE

Canon BG4-6673

HROA CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6703
Refurbishment Service
Serviced by GCE

Canon BG4-6703

Masking Blade

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6704
Ready to Ship
Serviced by GCE

Canon BG4-6704

IL C/D PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6705
Ready to Ship
Serviced by GCE

Canon BG4-6705

IL2 C/D PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6724
Ready to Ship
Serviced by GCE

Canon BG4-6724

Reticle control interface PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6728
Ready to Ship
Serviced by GCE

Canon BG4-6728

RS PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6735
Ready to Ship
Serviced by GCE

Canon BG4-6735

Robot, Reticle

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6736
Ready to Ship
Serviced by GCE

Canon BG4-6736

Robot, Reticle Cassette

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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