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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
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0 systems
Canon BG4-6629
Ready to Ship
Serviced by GCE

Canon BG4-6629

XY Stage CPU PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6631
Ready to Ship
Serviced by GCE

Canon BG4-6631

CDIF PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6632
Ready to Ship
Serviced by GCE

Canon BG4-6632

TV Image CPU PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6673
Ready to Ship
Serviced by GCE

Canon BG4-6673

HROA CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6703
Refurbishment Service
Serviced by GCE

Canon BG4-6703

Masking Blade

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6704
Ready to Ship
Serviced by GCE

Canon BG4-6704

IL C/D PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6705
Ready to Ship
Serviced by GCE

Canon BG4-6705

IL2 C/D PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6724
Ready to Ship
Serviced by GCE

Canon BG4-6724

Reticle control interface PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6728
Ready to Ship
Serviced by GCE

Canon BG4-6728

RS PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6735
Ready to Ship
Serviced by GCE

Canon BG4-6735

Robot, Reticle

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6736
Ready to Ship
Serviced by GCE

Canon BG4-6736

Robot, Reticle Cassette

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6745
Ready to Ship
Serviced by GCE

Canon BG4-6745

Reticle Control CPU PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
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