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Serviced by GCE
Canon BG4-6465
Measurement PCB (X)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
.webp)
Serviced by GCE
Canon BG4-6466
Measurement PCB (Y)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG4-6467
Measurement PCB (Theta)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG4-6554
QCD-2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-6579
MV CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG4-6582
HRD Processing Board
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-6590
P-Mount CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6596
M-POS PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-6601
D-Rack Power Supply (Alternate# BH5-3523)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6619
SNS Amp PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-6626
Main CPU, i4
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6628
Cam Unit
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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