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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
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0 systems
Canon BG4-6465
Ready to Ship
Serviced by GCE

Canon BG4-6465

Measurement PCB (X)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6466
Ready to Ship
Serviced by GCE

Canon BG4-6466

Measurement PCB (Y)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6467
Ready to Ship
Serviced by GCE

Canon BG4-6467

Measurement PCB (Theta)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6554
Ready to Ship
Serviced by GCE

Canon BG4-6554

QCD-2 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6579
Ready to Ship
Serviced by GCE

Canon BG4-6579

MV CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6582
Ready to Ship
Serviced by GCE

Canon BG4-6582

HRD Processing Board

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6590
Ready to Ship
Serviced by GCE

Canon BG4-6590

P-Mount CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6596
Ready to Ship
Serviced by GCE

Canon BG4-6596

M-POS PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6601
Refurbishment Service
Serviced by GCE

Canon BG4-6601

D-Rack Power Supply (Alternate# BH5-3523)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6619
Ready to Ship
Serviced by GCE

Canon BG4-6619

SNS Amp PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6626
Ready to Ship
Serviced by GCE

Canon BG4-6626

Main CPU, i4

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6628
Ready to Ship
Serviced by GCE

Canon BG4-6628

Cam Unit

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
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