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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Canon BG4-6463
Ready to Ship
Serviced by GCE

Canon BG4-6463

Stage CD PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6465
Ready to Ship
Serviced by GCE

Canon BG4-6465

Measurement PCB (X)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6466
Ready to Ship
Serviced by GCE

Canon BG4-6466

Measurement PCB (Y)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6467
Ready to Ship
Serviced by GCE

Canon BG4-6467

Measurement PCB (Theta)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6554
Ready to Ship
Serviced by GCE

Canon BG4-6554

QCD-2 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6579
Ready to Ship
Serviced by GCE

Canon BG4-6579

MV CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6582
Ready to Ship
Serviced by GCE

Canon BG4-6582

HRD Processing Board

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-6590
Ready to Ship
Serviced by GCE

Canon BG4-6590

P-Mount CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6596
Ready to Ship
Serviced by GCE

Canon BG4-6596

M-POS PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6601
Refurbishment Service
Serviced by GCE

Canon BG4-6601

D-Rack Power Supply (Alternate# BH5-3523)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6619
Ready to Ship
Serviced by GCE

Canon BG4-6619

SNS Amp PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-6626
Ready to Ship
Serviced by GCE

Canon BG4-6626

Main CPU, i4

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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