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Serviced by GCE
Canon BG4-2817
XY Distributor PCB Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
Canon BG4-3089
RC-2 PCB (2) Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-3323
Wafer Chuck, SiC, 4in
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-3669
IL C/D PCB Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-4930
XY Dist (Y) PCB Assembly W/Conn
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-5422
Theta piezo unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-5459
Piezo Analog PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6456
Stage DSP PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Serviced by GCE
Canon BG4-6457
XY Stage Pre-Amp PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6459
OFCD IF PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6460
Piezo Analog PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6463
Stage CD PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
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