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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
Canon BG4-2817
Ready to Ship
Serviced by GCE

Canon BG4-2817

XY Distributor PCB Assembly W/IC

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-3089
Ready to Ship
Serviced by GCE

Canon BG4-3089

RC-2 PCB (2) Assembly W/IC

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-3323
Ready to Ship
Serviced by GCE

Canon BG4-3323

Wafer Chuck, SiC, 4in

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-3669
Ready to Ship
Serviced by GCE

Canon BG4-3669

IL C/D PCB Assembly W/IC

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-4930
Ready to Ship
Serviced by GCE

Canon BG4-4930

XY Dist (Y) PCB Assembly W/Conn

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-5422
Ready to Ship
Serviced by GCE

Canon BG4-5422

Theta piezo unit

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-5459
Ready to Ship
Serviced by GCE

Canon BG4-5459

Piezo Analog PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6456
Ready to Ship
Serviced by GCE

Canon BG4-6456

Stage DSP PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6457
Ready to Ship
Serviced by GCE

Canon BG4-6457

XY Stage Pre-Amp PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6459
Ready to Ship
Serviced by GCE

Canon BG4-6459

OFCD IF PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6460
Ready to Ship
Serviced by GCE

Canon BG4-6460

Piezo Analog PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6463
Ready to Ship
Serviced by GCE

Canon BG4-6463

Stage CD PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
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