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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Canon BG4-2770-002
Ready to Ship
Serviced by GCE

Canon BG4-2770-002

Linear Motor Driver PCB (Y)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-2817
Ready to Ship
Serviced by GCE

Canon BG4-2817

XY Distributor PCB Assembly W/IC

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-3089
Ready to Ship
Serviced by GCE

Canon BG4-3089

RC-2 PCB (2) Assembly W/IC

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-3323
Ready to Ship
Serviced by GCE

Canon BG4-3323

Wafer Chuck, SiC, 4in

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-3669
Ready to Ship
Serviced by GCE

Canon BG4-3669

IL C/D PCB Assembly W/IC

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-4930
Ready to Ship
Serviced by GCE

Canon BG4-4930

XY Dist (Y) PCB Assembly W/Conn

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-5422
Ready to Ship
Serviced by GCE

Canon BG4-5422

Theta piezo unit

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-5459
Ready to Ship
Serviced by GCE

Canon BG4-5459

Piezo Analog PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6456
Ready to Ship
Serviced by GCE

Canon BG4-6456

Stage DSP PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6457
Ready to Ship
Serviced by GCE

Canon BG4-6457

XY Stage Pre-Amp PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-6459
Ready to Ship
Serviced by GCE

Canon BG4-6459

OFCD IF PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6460
Ready to Ship
Serviced by GCE

Canon BG4-6460

Piezo Analog PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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