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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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0 systems
Canon BG3-5879
Ready to Ship
Serviced by GCE

Canon BG3-5879

Wafer Chuck, Pin, 8in

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-6320
Ready to Ship
Serviced by GCE

Canon BG3-6320

EC12 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-6612
Ready to Ship
Serviced by GCE

Canon BG3-6612

RCS PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-6705
Refurbishment Service
Serviced by GCE

Canon BG3-6705

AC/DC Power Supply Unit, D-Rack (Alt# BG4-9171, BH5-3553)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG3-6748
Ready to Ship
Serviced by GCE

Canon BG3-6748

SCH EL PCB 2 Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG3-7743
Ready to Ship
Serviced by GCE

Canon BG3-7743

Image Processor 2 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG3-7744
Ready to Ship
Serviced by GCE

Canon BG3-7744

HRD2 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG3-7795
Ready to Ship
Serviced by GCE

Canon BG3-7795

EALSCD-PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-0993
Ready to Ship
Serviced by GCE

Canon BG4-0993

BG4-0993

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-2102
Ready to Ship
Serviced by GCE

Canon BG4-2102

TTL AF CPU PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-2766
Ready to Ship
Serviced by GCE

Canon BG4-2766

5CH OPAF Assembly W/IC

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-2770-001
Ready to Ship
Serviced by GCE

Canon BG4-2770-001

Linear Motor Driver PCB (X)

Compatibility
Canon FPA-3000
Condition
Removed from working system
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