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.webp)
Serviced by GCE
Canon BG3-6320
EC12 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
Canon BG3-6612
RCS PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
%202.webp)
Serviced by GCE
Canon BG3-6705
AC/DC Power Supply Unit, D-Rack (Alt# BG4-9171, BH5-3553)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG3-6748
SCH EL PCB 2 Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG3-7743
Image Processor 2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-7744
HRD2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-7795
EALSCD-PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-0993
BG4-0993
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-2102
TTL AF CPU PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-2766
5CH OPAF Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-2770-001
Linear Motor Driver PCB (X)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-2770-002
Linear Motor Driver PCB (Y)
Compatibility
Canon FPA-3000
Condition
Removed from working system
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