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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
Canon BG3-3831
Ready to Ship
Serviced by GCE

Canon BG3-3831

RT-DSP PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3832
Ready to Ship
Serviced by GCE

Canon BG3-3832

CDIF4 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3833
Ready to Ship
Serviced by GCE

Canon BG3-3833

STG-Preamp PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3854
Ready to Ship
Serviced by GCE

Canon BG3-3854

Power Supply, PM2415

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3861
Ready to Ship
Serviced by GCE

Canon BG3-3861

DCON1 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3862
Ready to Ship
Serviced by GCE

Canon BG3-3862

DCON2 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-3863
Ready to Ship
Serviced by GCE

Canon BG3-3863

DLED PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-5026
Ready to Ship
Serviced by GCE

Canon BG3-5026

BG3-5026

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-5181
Ready to Ship
Serviced by GCE

Canon BG3-5181

EALSCD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-5450
Refurbishment Service
Serviced by GCE

Canon BG3-5450

Exposure Shutter Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG3-5526
Ready to Ship
Serviced by GCE

Canon BG3-5526

Main Cam PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-5879
Ready to Ship
Serviced by GCE

Canon BG3-5879

Wafer Chuck, Pin, 8in

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part

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