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Serviced by GCE
Canon BG3-3526
Stage DSP PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
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Serviced by GCE
Canon BG3-3607
HL(M) IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3608
HL(S) IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3822
DMP-PRE PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG3-3823
DMP-DSP PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3824
AIN-IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3825
MLE-IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG3-3826
Laser-IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3827
Measurement PCB XY (ZMI 2004)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3828
Laser-IF PCB Assembly (R)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3829
Laser-IF PCB Assembly (Z)
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG3-3830
IO-DSP PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
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