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.webp)
Serviced by GCE
Canon BG3-3004
Damper CD5 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
Canon BG3-3014
M-POS PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3047
ECM-CD5 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG3-3048
ECI-CD5 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG3-3074
AC/DC Power Supply (E-Box)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG3-3088
MV-CD3 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3089
Stage CD2 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3122
STG BB PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3336
EXP CD PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-3357
URS-CD(EX) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG3-3424
Distribution PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Serviced by GCE
Canon BG3-3521
FZANA 2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
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