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Serviced by GCE
KLA Transfer Arm Motor
Transfer Arm Motor for Transfer Arm operation
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
KLA Turbo Pump
Turbo Pump
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Wafer Chuck
Wafer Chuck for Pre-Aligner
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Wafer ID Camera Upgrade
Wafer ID Camera upgrade, camera system hardware
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA XY Stage
Wafer Stage
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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