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Serviced by GCE
KLA Transfer Arm Assembly
Transfer Arm Assembly, full assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Spare parts, functionally tested before they ship
Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.
0 systems
Serviced by GCE
KLA Transfer Arm Motor
Transfer Arm Motor for Transfer Arm operation
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Turbo Pump
Turbo Pump
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Wafer Chuck
Wafer Chuck for Pre-Aligner
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Wafer ID Camera Upgrade
Wafer ID Camera upgrade, camera system hardware
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA XY Stage
Wafer Stage
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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