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Serviced by GCE
KLA Optical Column Assembly
Optical Column Assembly, camera not included
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
KLA PC6392 Metrabyte PCB
Serial Driver PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA PC Upgrade
Modernization of Windows PC Controller System
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA Pfeiffer TCP-380
Turbo pump controller
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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Serviced by GCE
KLA Piezo Z Stage Assembly
Piezo Z Stage Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Recipe Server
Recipe Server
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA Robot
Main Robot
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Shipping Braces
Shipping Braces for system lockdown during transport
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA SSD Drive
SSD upgrade hardware for MAC
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA Starcell 20
Ion Pump, Column
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA Starcell 55
Ion Pump, Chamber
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA Transfer Arm Assembly
Transfer Arm Assembly, full assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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