PLACEHOLDER — needs a Case Studies hero photo
Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
KLA Column Isolation Valve Assembly
Ready to Ship
Serviced by GCE

KLA Column Isolation Valve Assembly

Column Isolation Valve Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Elevator Assembly
Ready to Ship
Serviced by GCE

KLA Elevator Assembly

Elevator Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA End Effector
Ready to Ship
Serviced by GCE

KLA End Effector

End Effector for Robot

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA EOB Cable
Ready to Ship
Serviced by GCE

KLA EOB Cable

EOB cable for interconnection of Electron Optic Bus

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Flexible Circuit Card
Ready to Ship
Serviced by GCE

KLA Flexible Circuit Card

Flexible Circuit Card for stage high voltage connection

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Friction Pads
Ready to Ship
Serviced by GCE

KLA Friction Pads

Friction Pads, one set, for use on wafer stage

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA Interconnect PCB
Ready to Ship
Serviced by GCE

KLA Interconnect PCB

Interconnect PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA LED Assembly
Ready to Ship
Serviced by GCE

KLA LED Assembly

LED assembly for Light Optics, housing included

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Lens Assembly
Ready to Ship
Serviced by GCE

KLA Lens Assembly

Lens Assembly, including Octopule and Wien Filter

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA LidLift-001
Ready to Ship
Serviced by GCE

KLA LidLift-001

Chamber Lid Lift Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Mac Controller Upgrade
Ready to Ship
Serviced by GCE

KLA Mac Controller Upgrade

MAC G3 controller upgrade hardware

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA Manual Isolation Valve
Ready to Ship
Serviced by GCE

KLA Manual Isolation Valve

Manual Isolation Valve for Column Ion Pump

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
Load more

Can't find the part you need?

Not all available inventory may appear in the current results. Update your filters or reach out to our team — we'll help you source the right part.

Browse All Parts
Request Support