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Serviced by GCE
KLA 880-50510-000
Electron Source Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
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Serviced by GCE
KLA Aperture Motor Assembly
Aperture Motor Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Baking Kit
Baking Kit for bake out of Electron Source Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA Cable for Robot
Cable from Robot controller to Robot
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Cable HV Scint to ETDC
Cable, HV Scint to ETDC
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Camera Assembly
Camera Assembly, high and low magnification
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Canister
Canister to cap the eGun
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Removed from working system
Serviced by GCE
KLA CDSEM-IF PCB
Interface PCB for MAC controller
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA CeQ-001
Charge Equalization System, hardware
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Chamber Floatation Valve
Chamber Floatation Valve
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Coax Video Cable
Coax cable for Optical Camera
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA Column Isolation Valve Assembly
Column Isolation Valve Assembly
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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