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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Filter systems

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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Filter systems

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Compatibility
Offering Type
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0 systems
KLA 780-14688-000
Ready to Ship
Serviced by GCE

KLA 780-14688-000

Wien Filter Controller (WFCC)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14691-000
Ready to Ship
Serviced by GCE

KLA 780-14691-000

MCP Detector Controller (EB3)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14810-000
Ready to Ship
Serviced by GCE

KLA 780-14810-000

Robot Controller

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-15186-000
Ready to Ship
Serviced by GCE

KLA 780-15186-000

Transfer Arm, Ceramic

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA 780-17142-000
Serviced by GCE

KLA 780-17142-000

Wafer Pre-Aligner

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06465-000
Ready to Ship
Serviced by GCE

KLA 810-06465-000

Motor control cable from controller to HCI

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06466-000
Ready to Ship
Serviced by GCE

KLA 810-06466-000

Motor encoder cable from controller to each motor

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06475-000
Ready to Ship
Serviced by GCE

KLA 810-06475-000

Video Cable, Detector Amplifier to Computer

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06504-000
Ready to Ship
Serviced by GCE

KLA 810-06504-000

Reach aperture motor cable

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06575-000
Ready to Ship
Serviced by GCE

KLA 810-06575-000

Cable from Detector to Detector Amplifier

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-13180-000
Ready to Ship
Serviced by GCE

KLA 810-13180-000

Coax Cable, piezo to FCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-17212-000
Ready to Ship
Serviced by GCE

KLA 810-17212-000

Video Bundle Cable, interface for STB and Frame Grabber

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
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