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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Filter systems

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Compatibility
Offering Type
Condition
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
KLA 780-14691-000
Ready to Ship
Serviced by GCE

KLA 780-14691-000

MCP Detector Controller (EB3)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14810-000
Ready to Ship
Serviced by GCE

KLA 780-14810-000

Robot Controller

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-15186-000
Ready to Ship
Serviced by GCE

KLA 780-15186-000

Transfer Arm, Ceramic

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA 780-17142-000
Serviced by GCE

KLA 780-17142-000

Wafer Pre-Aligner

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06465-000
Ready to Ship
Serviced by GCE

KLA 810-06465-000

Motor control cable from controller to HCI

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06466-000
Ready to Ship
Serviced by GCE

KLA 810-06466-000

Motor encoder cable from controller to each motor

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06475-000
Ready to Ship
Serviced by GCE

KLA 810-06475-000

Video Cable, Detector Amplifier to Computer

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06504-000
Ready to Ship
Serviced by GCE

KLA 810-06504-000

Reach aperture motor cable

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-06575-000
Ready to Ship
Serviced by GCE

KLA 810-06575-000

Cable from Detector to Detector Amplifier

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-13180-000
Ready to Ship
Serviced by GCE

KLA 810-13180-000

Coax Cable, piezo to FCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 810-17212-000
Ready to Ship
Serviced by GCE

KLA 810-17212-000

Video Bundle Cable, interface for STB and Frame Grabber

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 820-07076-000
Ready to Ship
Serviced by GCE

KLA 820-07076-000

Gauge PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part

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