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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Filter systems

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0 systems
KLA 720-17255-000
Ready to Ship
Serviced by GCE

KLA 720-17255-000

Robot End Effector

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 720-17259-000
Ready to Ship
Serviced by GCE

KLA 720-17259-000

Stage Controller, MEI

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 780-08568-000
Ready to Ship
Serviced by GCE

KLA 780-08568-000

Piezo Controller

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-08986-000
Ready to Ship
Serviced by GCE

KLA 780-08986-000

ET Detector Assembly

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 780-10727-002
Ready to Ship
Serviced by GCE

KLA 780-10727-002

HCI PCB (Hardware Control Interface)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 780-13181-000
Ready to Ship
Serviced by GCE

KLA 780-13181-000

DC Distribution Chassis (DCPS)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 780-13182-000
Ready to Ship
Serviced by GCE

KLA 780-13182-000

ET Detector Controller (ETDC)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-13204-000
Ready to Ship
Serviced by GCE

KLA 780-13204-000

Schottky Gun Controller Chassis (SGCC)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 780-14016-000
Ready to Ship
Serviced by GCE

KLA 780-14016-000

ISA Bus Chassis

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 780-14020-000
Ready to Ship
Serviced by GCE

KLA 780-14020-000

Bladder

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
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KLA 780-14091-000
Ready to Ship
Serviced by GCE

KLA 780-14091-000

Column Control Chassis II (CCCII)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 780-14680
Ready to Ship
Serviced by GCE

KLA 780-14680

Stage Motor, Brushless

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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