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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Filter systems

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Compatibility
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
KLA 471-12148-000
Ready to Ship
Serviced by GCE

KLA 471-12148-000

Zygo 7705, Laser Head

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA 720-02841-500
Ready to Ship
Serviced by GCE

KLA 720-02841-500

Stage Motor, Brushed

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-02964-000
Ready to Ship
Serviced by GCE

KLA 720-02964-000

Picoammeter II

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-03775-000
Ready to Ship
Serviced by GCE

KLA 720-03775-000

Metrofocus PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-05721-000
Ready to Ship
Serviced by GCE

KLA 720-05721-000

Column Control Chassis I (CCC I)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-05888-000
Ready to Ship
Serviced by GCE

KLA 720-05888-000

TFE Gun Controller (EB4)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-06888-000
Ready to Ship
Serviced by GCE

KLA 720-06888-000

Focus Control Board (FCB)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-06914-000
Ready to Ship
Serviced by GCE

KLA 720-06914-000

Picoammeter III

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-07707-001
Ready to Ship
Serviced by GCE

KLA 720-07707-001

Docking Valve Assembly (Locking Cylinder)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-09841-001
Ready to Ship
Serviced by GCE

KLA 720-09841-001

Wehnhelt / Condenser Power Supply

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-12647-000
Ready to Ship
Serviced by GCE

KLA 720-12647-000

Energy Filter

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 720-17255-000
Ready to Ship
Serviced by GCE

KLA 720-17255-000

Robot End Effector

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
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