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Serviced by GCE
Canon BG3-2099
CDIF Adopter PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
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Serviced by GCE
Canon BG3-2175
IL1-C/D PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-2189
Damper-CD3 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-2247
X-Terminal Monitor, Color
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG3-2462
Main CPU
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
%20(1).webp)
Serviced by GCE
Canon BG3-2537
IL-3 CD PCB Assembly, EX4
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-2562
E-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG3-2649
CAP5 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-2794
IL5-C/D PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG3-2800
MB-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG3-2898
Masking Blade
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG3-3002
LM AMP
Compatibility
Canon FPA-3000
Condition
Removed from working system
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