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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Filter systems

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Compatibility
Offering Type
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
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0 systems
Canon Y75-6033
Ready to Ship
Serviced by GCE

Canon Y75-6033

Power Supply, PM16 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6034
Ready to Ship
Serviced by GCE

Canon Y75-6034

Power Supply, PM34 or PM35 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6035
Ready to Ship
Serviced by GCE

Canon Y75-6035

Power Supply, W33 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6036
Ready to Ship
Serviced by GCE

Canon Y75-6036

Power Supply, PDU1 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Credence ASIC Chip
Ready to Ship
Serviced by GCE

Credence ASIC Chip

ASIC Chip, MSI part# MSICBB

Compatibility
Credence Kalos 1
Condition
New
View Part
Credence DPS2
Ready to Ship
Serviced by GCE

Credence DPS2

DPS2 module, Kalos 2

Compatibility
Credence Kalos 2
Condition
Removed from working system
View Part
KLA 0133889-000
Ready to Ship
Serviced by GCE

KLA 0133889-000

Stage Controller, Equipe

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 0145906-001
Ready to Ship
Serviced by GCE

KLA 0145906-001

Aperture Strip Assembly, 14 holes

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA 0723-2024-001
Ready to Ship
Serviced by GCE

KLA 0723-2024-001

IP Controller Interface Kit (with new controller)

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA 130-00679-000
Ready to Ship
Serviced by GCE

KLA 130-00679-000

Feedthrough

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part
KLA 371-07734-000
Ready to Ship
Serviced by GCE

KLA 371-07734-000

Scintillator

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
View Part
KLA 460-15018-000
Ready to Ship
Serviced by GCE

KLA 460-15018-000

Image / Frame Grabber PCB

Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View Part

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