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Serviced by GCE
Canon Y60-0883
ALS Shutter Unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
Canon Y60-1244
X-Bar Mirror
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y60-1245
Y-Bar Mirror
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y60-2160
Tilt piezo unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y60-2273
Cable
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y75-6026
Power Supply, PM11 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y75-6027
Power Supply, PM1, PM2, PM14, PM22, or PM31 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y75-6028
Power Supply, PM13, PM15, PM23, or PM32 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y75-6029
Power Supply, PM24 or PM25 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y75-6030
Power Supply, PM26 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y75-6031
Power Supply, PM21 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon Y75-6032
Power Supply, PM36 (of BH5-3524)
Compatibility
Canon FPA-3000
Condition
Removed from working system
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