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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Filter systems

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Compatibility
Offering Type
Condition
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0 systems
Canon Y60-0812
Ready to Ship
Serviced by GCE

Canon Y60-0812

Z Ball Screw Unit (Ball Cage)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y60-0883
Ready to Ship
Serviced by GCE

Canon Y60-0883

ALS Shutter Unit

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y60-1244
Ready to Ship
Serviced by GCE

Canon Y60-1244

X-Bar Mirror

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y60-1245
Ready to Ship
Serviced by GCE

Canon Y60-1245

Y-Bar Mirror

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon Y60-2160
Ready to Ship
Serviced by GCE

Canon Y60-2160

Tilt piezo unit

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon Y60-2273
Ready to Ship
Serviced by GCE

Canon Y60-2273

Cable

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6026
Ready to Ship
Serviced by GCE

Canon Y75-6026

Power Supply, PM11 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6027
Ready to Ship
Serviced by GCE

Canon Y75-6027

Power Supply, PM1, PM2, PM14, PM22, or PM31 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6028
Ready to Ship
Serviced by GCE

Canon Y75-6028

Power Supply, PM13, PM15, PM23, or PM32 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6029
Ready to Ship
Serviced by GCE

Canon Y75-6029

Power Supply, PM24 or PM25 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6030
Ready to Ship
Serviced by GCE

Canon Y75-6030

Power Supply, PM26 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y75-6031
Ready to Ship
Serviced by GCE

Canon Y75-6031

Power Supply, PM21 (of BH5-3524)

Compatibility
Canon FPA-3000
Condition
Removed from working system
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