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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Filter systems

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Compatibility
Offering Type
Condition
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0 systems
Canon BH2-9114
Ready to Ship
Serviced by GCE

Canon BH2-9114

Motor Driver Unit, AC

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BH5-3739
Ready to Ship
Serviced by GCE

Canon BH5-3739

Driver

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BH5-4221
Ready to Ship
Serviced by GCE

Canon BH5-4221

X Terminal Monitor, Black & White

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BH5-6240
Ready to Ship
Serviced by GCE

Canon BH5-6240

Stage Sensor Box

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BH9-0069
Ready to Ship
Serviced by GCE

Canon BH9-0069

SCSI Extender PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BM3-8923
Ready to Ship
Serviced by GCE

Canon BM3-8923

BM3-8923

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon Chuck Maintenance Kit
Ready to Ship
Serviced by GCE

Canon Chuck Maintenance Kit

Chuck Maintenance Kit

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon Lockdown Kit
Ready to Ship
Serviced by GCE

Canon Lockdown Kit

Lockdown Kit for system lockdown during transport

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon Reticle Reference Marks EX5
Ready to Ship
Serviced by GCE

Canon Reticle Reference Marks EX5

Reticle Reference Marks, EX5

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon X-Term Kit
Ready to Ship
Serviced by GCE

Canon X-Term Kit

X-Terminal Solution for i5, 17in Monitor

Compatibility
Canon FPA-3000
Condition
New
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Canon XY Stage
Ready to Ship
Serviced by GCE

Canon XY Stage

Wafer Stage for Canon Stepper

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon XY Stage with Tilt Stage
Ready to Ship
Serviced by GCE

Canon XY Stage with Tilt Stage

XY stage with linear motor and tilt stage

Compatibility
Canon FPA-3000
Condition
Removed from working system
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