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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Filter systems

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Compatibility
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
Canon BH5-3739
Ready to Ship
Serviced by GCE

Canon BH5-3739

Driver

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BH5-4221
Ready to Ship
Serviced by GCE

Canon BH5-4221

X Terminal Monitor, Black & White

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BH5-6240
Ready to Ship
Serviced by GCE

Canon BH5-6240

Stage Sensor Box

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BH9-0069
Ready to Ship
Serviced by GCE

Canon BH9-0069

SCSI Extender PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BM3-8923
Ready to Ship
Serviced by GCE

Canon BM3-8923

BM3-8923

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon Chuck Maintenance Kit
Ready to Ship
Serviced by GCE

Canon Chuck Maintenance Kit

Chuck Maintenance Kit

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Lockdown Kit
Ready to Ship
Serviced by GCE

Canon Lockdown Kit

Lockdown Kit for system lockdown during transport

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Reticle Reference Marks EX5
Ready to Ship
Serviced by GCE

Canon Reticle Reference Marks EX5

Reticle Reference Marks, EX5

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon X-Term Kit
Ready to Ship
Serviced by GCE

Canon X-Term Kit

X-Terminal Solution for i5, 17in Monitor

Compatibility
Canon FPA-3000
Condition
New
View Part
Canon XY Stage
Ready to Ship
Serviced by GCE

Canon XY Stage

Wafer Stage for Canon Stepper

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon XY Stage with Tilt Stage
Ready to Ship
Serviced by GCE

Canon XY Stage with Tilt Stage

XY stage with linear motor and tilt stage

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon Y60-0812
Ready to Ship
Serviced by GCE

Canon Y60-0812

Z Ball Screw Unit (Ball Cage)

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
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