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.webp)
Serviced by GCE
Canon BG5-3342
BG5-3342
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
Canon BG6-3046
Ceramic finger
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG9-3500
ADP-2 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG9-3501
IMP2 PCB (alt# BG4-9716)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
.webp)
Serviced by GCE
Canon BG9-3502
ACC-I (1) PCB Assembly W/IC
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG9-4084
ACC-1 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG9-4085
ACC-2 PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG9-4147
Extension PCB Assembly, M3 DRV.PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG9-4152
PCB, Extension
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BH2-9114
Motor Driver Unit, AC
Compatibility
Canon FPA-3000
Condition
Removed from working system
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