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.webp)
Serviced by GCE
Canon BG5-0013
D-CON2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
.webp)
Serviced by GCE
Canon BG5-0015
RT-CPU PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG5-0025
Motor Driver Unit (WQMBY)
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-0060
Main-Cam PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-0174
PA/SH PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-0429
AIN-IF3 PCB2 Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-0430
CDIF5 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-1255
WF-I/F PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-1256
RC-I/F PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-1262
MLE-IF2 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-1890
Main Ref Mem PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-2509
Motor Driver Unit
Compatibility
Canon FPA-3000
Condition
Removed from working system
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