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Serviced by GCE
Canon BG4-9296
Linear Motor Driver PCB (XY) - for EX5
Compatibility
Canon FPA-3000
Condition
Removed from working system
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
Serviced by GCE
Canon BG4-9299
Linear Motor Driver PCB (FZ) - for EX5
Compatibility
Canon FPA-3000
Condition
Removed from working system
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Serviced by GCE
Canon BG4-9301
Linear Motor Drive, FZ-1, Theta-Drive
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-9302
Linear Motor Drive, FZ-2, Z-Drive
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-9307
CAP3 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-9386
CD90-CD PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-9667
CD83-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-9715
ADP-2 PCB
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG4-9716
IMP3 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Serviced by GCE
Canon BG4-9745
OFCD IF(2) PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG5-0009
Laser-IF (WLC), Measurement Board
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG5-0012
D-CON1 PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
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