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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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0 systems
Canon BG4-9265
Ready to Ship
Serviced by GCE

Canon BG4-9265

Slave Unit for Remote Terminal

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9296
Ready to Ship
Serviced by GCE

Canon BG4-9296

Linear Motor Driver PCB (XY) - for EX5

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9299
Ready to Ship
Serviced by GCE

Canon BG4-9299

Linear Motor Driver PCB (FZ) - for EX5

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9301
Ready to Ship
Serviced by GCE

Canon BG4-9301

Linear Motor Drive, FZ-1, Theta-Drive

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9302
Ready to Ship
Serviced by GCE

Canon BG4-9302

Linear Motor Drive, FZ-2, Z-Drive

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9307
Ready to Ship
Serviced by GCE

Canon BG4-9307

CAP3 PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9386
Ready to Ship
Serviced by GCE

Canon BG4-9386

CD90-CD PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9667
Ready to Ship
Serviced by GCE

Canon BG4-9667

CD83-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-9715
Ready to Ship
Serviced by GCE

Canon BG4-9715

ADP-2 PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9716
Ready to Ship
Serviced by GCE

Canon BG4-9716

IMP3 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-9745
Ready to Ship
Serviced by GCE

Canon BG4-9745

OFCD IF(2) PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG5-0009
Ready to Ship
Serviced by GCE

Canon BG5-0009

Laser-IF (WLC), Measurement Board

Compatibility
Canon FPA-3000
Condition
Removed from working system
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