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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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0 systems
Canon BG4-8605
Ready to Ship
Serviced by GCE

Canon BG4-8605

Y Drive Motor

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-8680
Ready to Ship
Serviced by GCE

Canon BG4-8680

EXPO-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-8705
Ready to Ship
Serviced by GCE

Canon BG4-8705

MV-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-8815
Ready to Ship
Serviced by GCE

Canon BG4-8815

CDIF2 PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9151
Ready to Ship
Serviced by GCE

Canon BG4-9151

FZANA PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-9152
Ready to Ship
Serviced by GCE

Canon BG4-9152

Stage Piping PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-9171
Refurbishment Service
Serviced by GCE

Canon BG4-9171

AC/DC Power Supply Unit, D-Rack (Alt# BG3-6705, BH5-3553)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-9175
Ready to Ship
Serviced by GCE

Canon BG4-9175

MLE IF PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-9191
Ready to Ship
Serviced by GCE

Canon BG4-9191

XY PRE2 PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-9217
Ready to Ship
Serviced by GCE

Canon BG4-9217

DSP

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-9218
Ready to Ship
Serviced by GCE

Canon BG4-9218

MLE-Intermediate PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-9250
Ready to Ship
Serviced by GCE

Canon BG4-9250

IL2A CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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