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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
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0 systems
Canon BG4-7521
Refurbishment Service
Serviced by GCE

Canon BG4-7521

Robot, SCH (R)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-7581
Ready to Ship
Serviced by GCE

Canon BG4-7581

QCD-3 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-7937
Ready to Ship
Serviced by GCE

Canon BG4-7937

CAP2, CCD OPTF PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-7938
Ready to Ship
Serviced by GCE

Canon BG4-7938

HROA CD2 PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8182
Ready to Ship
Serviced by GCE

Canon BG4-8182

CD80-CD2 PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8192
Ready to Ship
Serviced by GCE

Canon BG4-8192

Intermediate Library CTRL PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8193
Ready to Ship
Serviced by GCE

Canon BG4-8193

Library, Elevator Control PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8195
Ready to Ship
Serviced by GCE

Canon BG4-8195

N6in INT-LIB Control PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-8224
Ready to Ship
Serviced by GCE

Canon BG4-8224

M-POS CD PCB

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-8591
Ready to Ship
Serviced by GCE

Canon BG4-8591

EASL-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG4-8592
Ready to Ship
Serviced by GCE

Canon BG4-8592

EASR-CD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG4-8605
Ready to Ship
Serviced by GCE

Canon BG4-8605

Y Drive Motor

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
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