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Serviced by GCE
Canon BG4-6823
WF CPU PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
.webp)
Serviced by GCE
Canon BG4-6894
A-scope left relay lens
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-6902
ASCD(L) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6903
ASCD(R) PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6928
URS CD PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6943
ALS CD PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6974
E-CD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-7001
RS-232C Switching PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-7073
Mount
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG4-7082
Lamp power supply for 2kW Mercury Lamp
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-7165
BG4-7165
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-7329
PPC PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
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